mm (inches) 530 nm 460 nm 1 Maximum field of view with 3/2” camera. 2 L&S: Line and Space. Values for blue LED. 1 Values are assessed through repeated measurements on a reference standard performed under environmentally controlled conditions in accordance with Sensofar’s metrology protocols. Get answers to your questions! Just write us an email or search for Get answers to your questions! Just write us an email or search for
Dimensions
Weight: 8 Kg (18 lbs)
Technology
Light sources
Objective lenses
MAG
0.243X
NA
0.015
WD (mm)
80
FOV1 (mm)
34.7 x 29.1
Optical resolution2 (µm)
9.35
Accuracy and repeatability
U, σ
Step height
U=2.5 µm, σ= 0.05 µm
Area roughness (Sa)
U=1 µm, σ=0.01 µm
Profile roughness (Ra)
U=1 µm, σ= 0.05 µm
Width measurement1
U=5 µm, σ= 1 µm
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