mm (inches) 580 nm 460 nm 1 Maximum field of view with 2/3” camera and 0.25X optics. 2 Pixel size on the surface. 3 L&S: Line and Space, half of the diffraction limit according to the Rayleigh criterion. Values for blue LED in brightfield objectives. 4 Values are assessed through repeated measurements on a reference standard performed under environmentally controlled conditions in accordance with Sensofar’s metrology protocols. 5 On smooth surfaces. Up to 72° on rough surfaces. Other objectives are available. 1 Maximum field of view with 2/3” camera and 0.25X optics. 2 Pixel size on the surface. 3 L&S: Line and Space, half of the diffraction limit according to the Rayleigh criterion. Spatial sampling could limit the optical resolution for interferometric objectives. Values for white LED in interferometric objectives. 4 Values are assessed through repeated measurements on a reference standard performed under environmentally controlled conditions in accordance with Sensofar’s metrology protocols. 5 On smooth surfaces. 1 Values obtained in a VC-E vibration environment. Objective used for Confocal and Ai Focus Variation 50X 0.80 NA and for CSI 50X 0.50NA. Resolution 1220×1024 pixels. Uncertainty (U) according to ISO/IEC guide 98-3:2008 GUM:1995, K=1,96 (level of confidence 95%). σ according to 25 measures. For steps smaller than 5 μm, σ < 5 nm. Get answers to your questions! Just write us an email or search for Get answers to your questions! Just write us an email or search for
Dimensions
Weight: 5.3 Kg (11.7 lbs)
Technologies
Light sources
Objective lenses
MAG
5X BF
10X BF
20X BF
50X BF
100X BF
NA
0.15
0.30
0.45
0.80
0.90
WD (mm)
20.00
15.80
3.00
1.00
1.00
FOV1 (µm)
2826 x 2826
1413 x 1413
707 x 707
283 x 283
141 x 141
Spatial sampling2 (µm)
2.76
1.38
0.69
0.27
0.14
Optical resolution3 (µm)
0.94
0.47
0.31
0.18
0.16
Measurement noise4 (nm)
120
45
10
4
3
Maximum slope5 (º)
9
17
27
53
64
MAG
2.5X TI
5X MC
10X MC
10X MR
20X MC
20X MR
50X MR
100X MR
NA
0.075
0.14
0.10
0.28
0.10
0.38
0.50
0.70
WD (mm)
10.3
13.0
25.0
8.0
16.7
6.0
3.6
2.0
FOV1 (µm)
5652 x 5652
2826 x 2826
1413 x 1413
1413 x 1413
707 x 707
707 x 707
283 x 283
141 x 141
Spatial sampling2 (µm)
5.52
2.76
1.38
1.38
0.69
0.69
0.27
0.13
Optical resolution3 (µm)
2.34
1.25
1.75
0.63
1.75
0.46
0.35
0.25
System noise4 (nm)
CSI <1 nm ePSI <0.1 nm
Maximum slope5 (º)
4
8
6
16
6
22
30
44
Z performance
Z
LINEAR STAGE
Vertical range
20 mm (0.79″)
Resolution
5 nm
Accuracy and repeatibility
STANDARD
VALUE
LINEAR SCANNER1
TECHNIQUE
Step Height (H)
<10
U= (0.005 + H/50) μm
σ < 10 nmConfocal, AiFV
& CSI
>10
U = (0.120 + H/120) μm
σ < 10 nmConfocal, AiFV
& CSI
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S mart 2 sensor
Areal Confocal
Brightfield
Interferometry
