Technologies Confocal Interferometry PSI | ePSI | CSI Ai Focus Variation Light sources 630nm 530nm 460nm 575nm Dimensions Base & Column Controller Objective lenses performance Confocal / Ai Focus Variation 1 Maximum field of view with 3/2” camera and 0.5X optics. 2 Pixel size on the surface. 3 L&S: Line and Space. Values for blue LED. 4 System noise measured as the difference between two consecutive measures on a calibration mirror placed perpendicular to the optical axis. 5 On smooth surfaces, up to 71º. On scattering surfaces, up to 86º. PSI / ePSI / CSI Other objectives available: Variable reflectance | Michelson | Mirau | Linnik 1 Maximum field of view with 3/2” camera and 0.5X optics. 2 Pixel size on the surface. 3 L&S: Line and Space. Values for blue LED. 4 System noise measured as the difference between two consecutive measures on a calibration mirror placed perpendicular to the optical axis. For PSI, 10 phase averages with vibration isolation activated. The 0.01 nm are achieved with Piezo stage scanner and temperature controlled room. Values for green LED (white LED for CSI). Resolution HD. Accuracy and repeatability Objective lense used for Confocal and Ai Focus Variation 50X 0.80 NA and for CSI and PSI 50X 0.50NA. Rotational stage All values according to ISO1101 at 20ºC +/- 1º in an anti-vibration environment. Computer & Operating system Get answers to your questions! Just write us an email or search for Get answers to your questions! Just write us an email or search for
MAG
5X BF
10X BF
20X BF
50X BF
100X BF
150X EPI
NA
0.15
0.30
0.45
0.80
0.90
0.90
WD (mm)
23.5
17.5
4.5
1.0
1.0
1.5
FOV1 (µm)
3378 x 2826
1689 x 1413
845 x 707
338 x 283
169 x 141
113 x 94
Spatial sampling2 (µm)
1.38
0.69
0.34
0.13
0.07
0.05
Optical resolution3 (µm)
0.94
0.47
0.31
0.18
0.16
0.16
System noise4 (nm)
100
30
8
4
3
2
Maximum slope5 (º)
9
17
27
53
64
64
MAG
5X BF
10X BF
20X BF
50X BF
100X BF
150X EPI
System noise4 (nm)
100
30
8
4
3
2
Maximum slope5 (º)
9
17
27
53
64
64
MAG
5X MC
10X MC
10X MR
20X MC
20X MR
50X MR
100X MR
NA
0.14
0.10
0.28
0.10
0.38
0.50
0.70
WD (mm)
13.0
25.0
8.0
16.7
6.0
3.6
2.0
FOV1 (µm)
3378 x 2826
1689 x 1413
1689 x 1413
845 x 707
845 x 707
338 x 283
169 x 141
Spatial sampling2 (µm)
1.38
0.69
0.69
0.34
0.34
0.13
0.07
Optical resolution3 (µm)
1.00
1.40
0.50
1.40
0.37
0.28
0.20
System noise4 (nm)
PSI / ePSI 0.1 nm (0.01 nm with PZT) CSI 1 nm
Maximum slope5 (º)
8
6
16
6
22
30
44
MAG
5X MC
10X MC
10X MR
20X MC
20X MR
50X MR
100X MR
System noise4 (nm)
PSI / ePSI 0.1 nm (0.01 nm with PZT) CSI 1 nm
Maximum slope5 (º)
8
6
16
6
22
30
44
5 On smooth surfaces, up to 71º. On scattering surfaces, up to 86º.
Standard
Value
U, σ
Technique
Step height
48600 nm
U=300 nm, σ= 10 nm
Confocal & CSI
7616 nm
U=79 nm, σ= 5 nm
Confocal & CSI
941.6 nm
U=7 nm, σ= 1 nm
Confocal & CSI
186 nm
U=4 nm, σ= 0.4 nm
Confocal & CSI
44.3 nm
U=0.5 nm, σ= 0.1 nm
PSI
10.8 nm
U=0.5 nm, σ= 0.05 nm
PSI
Areal roughness (Sa)7
0.79 µm
U=0.04 µm, σ=0.0005 µm
Confocal, AiFV & CSI
Profile roughness (Ra)8
2.40 µm
U=0.03 µm, σ= 0.002 µm
Confocal, AiFV & CSI
0.88 µm
U=0.015 µm, σ= 0.0005 µm
Confocal, AiFV & CSI
0.23 µm
U=0.005 µm, σ= 0.0002 µm
Confocal, AiFV & CSI
Resolution 1220×1024 pixels. All measurements are done using PZT.
Uncertainty (U) according to ISO/IEC guide 98-3:2008 GUM:1995, K=1,96 (level of confidence 95%).
σ according to 25 measures.
7 Area of 1x1mm. 8 Profile of 4mm length.
Max. measurable diameter
200 mm
Max. clamping diameter10
20 mm
Max. workpiece weight
3 Kg
Accuracy (A)
5 Arc sec/º
Bidirectional repeatability (A)
10 Arc sec
Resolution (B)
0.5 Arc sec
Straightness error11
3.6 µm / 40 mm
Parallelism error11
53.9 µm / 40 mm
Flatness error12
20 µm
10 ER32 collet holder. 11 St Flatness deviation according to ISO25178-2 taken on a SiC reference flat mirror and 20X objective in Confocal acquisition mode. 12 All values are taken with a 20X objective in Confocal acquisition mode and 40 mm evaluation length.
Computer
8th generation Intel® Core™ i7 Processor
Display 3840×2160 pixels resolution (4K)(27″)
Operating System
Microsoft Windows 10, 64-bits
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