Profiler technologies Light sources 460nm 580nm Profiler dimensions Objective lenses Confocal / Ai Focus Variation 1 Maximum field of view with 2/3” camera and 0.25X optics. 2 Pixel size on the surface. 3 L&S: Line and Space, half of the diffraction limit according to the Rayleigh criterion. Values for blue LED. 4 Values are assessed through repeated measurements on a reference standard performed under environmentally controlled conditions in accordance with Sensofar’s metrology protocols. 5 On smooth surfaces. Up to 72° on rough surfaces. Other objectives are available. 1 Maximum field of view with 2/3” camera and 0.25X optics. 2 Pixel size on the surface. 3 L&S: Line and Space, half of the diffraction limit according to the Rayleigh criterion. Values for white LED. 4 Values are assessed through repeated measurements on a reference standard performed under environmentally controlled conditions in accordance with Sensofar’s metrology protocols. 5 On smooth surfaces. Up to 72° on rough surfaces. Other objectives are available. Accuracy and repeatability Values obtained in a VC-E vibration environment. Objective used Computer & Operating system Get answers to your questions! Just write us an email or search for Get answers to your questions! Just write us an email or search for
MAG
5X BF
10X BF
20X BF
50X BF
100X BF
NA
0.15
0.30
0.45
0.80
0.90
WD (mm)
20.0
15.8
3.0
1.0
1.0
FOV1 (µm)
2826 x 2826
1413 x 1413
707 x 707
283 x 283
141 x 141
Spatial sampling2 (µm)
2.76
1.38
0.69
0.27
0.14
Optical resolution3 (µm)
0.94
0.47
0.31
0.18
0.16
System noise4 (nm)
120
45
10
4
3
Maximum slope5 (º)
9
17
27
53
64
MAG
5X BF
10X BF
20X BF
50X BF
100X BF
System noise4 (nm)
120
45
10
4
3
Maximum slope5 (º)
9
17
27
53
64
MAG
2.5X TI
5X MC
10X MC
10X MR
20X MC
20X MR
50X MR
100X MR
NA
0.075
0.14
0.10
0.28
0.10
0.38
0.50
0.70
WD (mm)
10.3
13.0
25.0
8.0
16.7
6.0
3.6
2.0
FOV1 (µm)
5652 x 5652
2826 x 2826
1413 x 1413
1413 x 1413
707 x 707
707 x 707
283 x 283
141 x 141
Spatial sampling2 (µm)
5.52
2.76
1.38
1.38
0.69
0.69
0.27
0.13
Optical resolution3 (µm)
2.34
1.25
1.75
0.63
1.75
0.46
0.35
0.25
System noise4 (nm)
CSI <1 nm ePSI <0.1 nm
Maximum slope5 (º)
4
8
6
16
6
22
30
44
MAG
2.5X TI
5X MC
10X MC
10X MR
20X MC
20X MR
50X MR
100X MR
System noise4 (nm)
CSI <1 nm ePSI <0.1 nm
Maximum slope5 (º)
4
8
6
16
6
22
30
44
Standard
Value
Uncertainty (U)
Repeatability (σ)
Technique
Step height (H)
<10 µm
U= (0.005 + H/50) μm
<10 nm
Confocal, AiFV & CSI
>10 µm
U = (0.120 + H/120) μm
>10 nm
Confocal, AiFV & CSI
Areal roughness (Sa)
0.79 µm
40 nm
6 nm
Confocal, AiFV & CSI
for Confocal and Ai Focus Variation 50X 0.80 NA and for CSI 50X 0.50NA. Resolution 1024×1024
pixels. Extended uncertainty (U) according to ISO/IEC guide 98-3:2008 GUM:1995, K=1,96 (level
of confidence 95%). σ according to 25 measures.
Computer requirements
Intel® Core™ i5/i7 Processor Ethernet connectivity,
minimum 1920 x 1080 display resolution
Operating System
Microsoft Windows 10 or higher
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S lynx 2
Compact 3D Profiler
Brightfield
Interferometry
