Profiler technologies Light sources 630nm 530nm 460nm 575nm Dimensions Objective lenses Confocal / Ai Focus Variation 1 Maximum field of view with 3/2” camera and 0.5X optics. 2 Pixel size on the surface. 3 L&S: Line and Space. Values for blue LED. 4 System noise measured as the difference between two consecutive measures on a calibration mirror placed perpendicular to the optical axis. 5 On smooth surfaces, up to 71º. On scattering surfaces, up to 86º. PSI / ePSI / CSI 1 Maximum field of view with 3/2” camera and 0.5X optics. 2 Pixel size on the surface. 3 L&S: Line and Space. Values for blue LED. 4 System noise measured as the difference between two consecutive measures on a calibration mirror placed perpendicular to the optical axis. For PSI, 10 phase averages with vibration isolation activated. The 0.01 nm are achieved with Piezo stage scanner and temperature controlled room. Values for green LED (white LED for CSI). Resolution HD. 5 On smooth surfaces, up to 71º. On scattering surfaces, up to 86º. Gantry XY stage Certification This system has been carefully designed to meet several industry standards, like the SEMI S2 and S8, and has also been certified by TÜV Rheinland. The S neox Cleanroom sensorhead has been carefully engineered to be compatible with ISO Class 1 and ESD compatible. Get answers to your questions! Just write us an email or search for Get answers to your questions! Just write us an email or search for
mm (inch)
MAG
5X BF
10X BF
20X BF
50X BF
100X BF
150X EPI
NA
0.15
0.30
0.45
0.80
0.90
0.90
WD (mm)
20.0
15.8
3.0
1.0
1.0
1.5
FOV1 (µm)
3378 x 2826
1689 x 1413
845 x 707
338 x 283
169 x 141
113 x 94
Spatial sampling2 (µm)
1.38
0.69
0.34
0.13
0.07
0.05
Optical resolution3 (µm)
0.94
0.47
0.31
0.18
0.16
0.16
System noise4 (nm)
115
30
8
4
3
2
Maximum slope5 (º)
9
17
27
53
64
64
MAG
5X BF
10X BF
20X BF
50X BF
100X BF
150X EPI
System noise4 (nm)
115
30
8
4
3
2
Maximum slope5 (º)
9
17
27
53
64
64
MAG
5X MC
10X MC
10X MR
20X MC
20X MR
50X MR
100X MR
NA
0.14
0.10
0.28
0.10
0.38
0.50
0.70
WD (mm)
13.0
25.0
8.0
16.7
6.0
3.6
2.0
FOV1 (µm)
3378 x 2826
1689 x 1413
1689 x 1413
845 x 707
845 x 707
338 x 283
169 x 141
Spatial sampling2 (µm)
1.38
0.69
0.69
0.34
0.34
0.13
0.07
Optical resolution3 (µm)
1.00
1.40
0.50
1.40
0.37
0.28
0.20
System noise4 (nm)
PSI / ePSI 0.1 nm (0.01 nm with PZT) CSI 1 nm
Maximum slope5 (º)
8
6
16
6
22
30
44
MAG
5X MC
10X MC
10X MR
20X MC
20X MR
50X MR
100X MR
System noise4 (nm)
PSI / ePSI 0.1 nm (0.01 nm with PZT) CSI 1 nm
Maximum slope5 (º)
8
6
16
6
22
30
44
Positioning system
Two axes Gantry: XY translation of the head
Travel range (mm)
600 x 600
Travel speed
Max. 1m/s
Control type
Linear close loop
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S neox Grand Format
High precision for large samples
Brightfield
Interferometry
XY
